Full description not available
E**N
Book on SE
A good follow up on Tompkins "A user's guide to Ellipsometry". This book deals with Spectroscopic Ellipsometry, but also covers the basics of single-wavelength ellipsometry. The book covers analysis of Thermal Oxide, PECVD SiO, SiO2, SiN, a-Si, etc. It also covers the mathematics behind the Lorentz oscillator, used in SE layer modelling.
J**R
Spectroscopic Ellipsometry and Reflectometry - A Users Guide
Most useful book on this subject I have ever read.
A**.
Recevied on time
I liked this book very much. This book is up to my expetation.
